Structure and hardness modifications induced by UV light in Ge-As-S amorphous chalcogenide films

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 1997, Pages 467-470

  Popescu, M ^a   Skordeva, E ^a   Arsova, D ^a   Vateva, E ^a   Sava, F ^a   Lorinczi, A ^a  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; COMPOSITION EFFECTS; HARDENING; HARDNESS; PHOTOCONDUCTING MATERIALS; SEMICONDUCTING GERMANIUM COMPOUNDS; SULFUR; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

CHALCOGENIDES;

SEMICONDUCTING FILMS;

EID: 0030635399     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)