Measurement of linear nanometric distances between smooth plane parallel bodies by scattered total internal reflection

Applied Physics Letters

Volumn 69, Issue 2, 1996, Pages 141-142

  Sides, Paul J ^a   Lo, Jenny ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS; CALCULATIONS; CERAMIC MATERIALS; HELIUM NEON LASERS; LIGHT REFLECTION; LIGHT SCATTERING; MAGNETIC DEVICES; PRISMS; REFRACTIVE INDEX;

EVANESCENT WAVES; FLY HEIGHT MEASUREMENT; MAGNETIC RECORDING SLIDERS; SCATTERED TOTAL INTERNAL REFLECTION;

DISTANCE MEASUREMENT;

EID: 0030575226     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116900     Document Type: Article

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