High-modulation-depth and short-cavity-length silicon Fabry-Perot modulator with two grating Bragg reflectors

Applied Physics Letters

Volumn 68, Issue 2, 1996, Pages 170-172

  Liu, Mark Y ^a   Chou, Stephen Y ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; LIGHT MODULATION; MIRRORS; OPTICAL WAVEGUIDES; PERFORMANCE; REACTIVE ION ETCHING; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY;

BRAGG REFLECTORS; FABRY PEROT CAVITY; FABRY PEROT MODULATOR;

LIGHT MODULATORS;

EID: 0030574531     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116449     Document Type: Article

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