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Volumn 100, Issue 1, 1996, Pages 5-8

An assessment of density functional methods for calculating thermochemistries of Si-H-Cl compounds

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CHEMICAL VAPOR DEPOSITION; MATHEMATICAL TECHNIQUES; THERMODYNAMIC PROPERTIES;

EID: 0030568153     PISSN: 00223654     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp952370t     Document Type: Article
Times cited : (24)

References (38)
  • 25
    • 0003625270 scopus 로고
    • Chemical Vapor Deposition at Low Pressures
    • Hitchman, M. L., Jensen, K. F., Eds.; Academic: San Diego, CA
    • Hitchman, M. L.; Jensen, K. F. Chemical Vapor Deposition at Low Pressures. In Chemical Vapor Deposition; Hitchman, M. L., Jensen, K. F., Eds.; Academic: San Diego, CA, 1993; p 159.
    • (1993) Chemical Vapor Deposition , pp. 159
    • Hitchman, M.L.1    Jensen, K.F.2
  • 29
    • 0000626886 scopus 로고
    • JANAF Thermochemical Tables
    • JANAF Thermochemical Tables, J. Phys. Chem. Ref. Data, Supplement 1, 1985, 14.
    • (1985) J. Phys. Chem. Ref. Data , vol.14 , Issue.1 SUPPL.
  • 32
    • 85033056545 scopus 로고    scopus 로고
    • note
    • 3 and using the corrections of +0.4 and +1.3 kcal/mol, respectively, from ref 35.
  • 34
    • 0003995772 scopus 로고
    • Energetics of Organometallic Species
    • Martinho-Simoes, J. A., Ed.; Kluwer: Dordrecht, Chapter 11
    • Walsh, R. Energetics of Organometallic Species; Martinho-Simoes, J. A., Ed.; NATO-ASI Series C; Kluwer: Dordrecht, 1992; Vol. 367, Chapter 11, p 171.
    • (1992) NATO-ASI Series C , vol.367
    • Walsh, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.