Construction of a plasma polymerization reactor system for laboratory use

Journal of Applied Polymer Science

Volumn 62, Issue 1, 1996, Pages 145-151

  Huber, F ^a   Springer, J ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; COMPOSITION; ELECTRODES; PLASMA DEVICES; PRESSURE; SPECTROGRAPHS; SUBSTRATES; TEMPERATURE;

EXCITATION ELECTRODE; FEED GAS COMPOSITION; NONINTRUSIVE TECHNIQUES; OPTICAL PLASMA EMISSIONS; PLASMA DEPOSITION; PLASMA POLYMERIZATION; PLASMA POLYMERIZATION REACTOR SYSTEM; SPECTROSCOPE;

POLYMERIZATION;

EID: 0030567940     PISSN: 00218995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4628(19961003)62:1<145::AID-APP18>3.0.CO;2-4     Document Type: Article

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