Conversion of organic-inorganic polymers to ceramics by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 262-265

  Pivin, Jean Claude ^a   Colombo, Paolo ^b  

^a CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC COATINGS; INORGANIC POLYMERS; ION IMPLANTATION; ORGANIC POLYMERS; POLYSILANES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE;

POLYCARBOSILANE; POLYSILOXANE;

ION BOMBARDMENT;

EID: 0030566531     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00522-8     Document Type: Article

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