Ideal monolayer adsorption of germanium on Si(100) surface

Applied Surface Science

Volumn 107, Issue , 1996, Pages 137-144

  Sugahara, Satoshi ^a   Kitamura, Takuya ^a   Imai, Sigeru ^a   Uchida, Yasutaka ^b   Matsumura, Masakiyo ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Nishi Tokyo University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; MONOLAYERS; SEMICONDUCTING SILICON; SURFACE PHENOMENA;

ATOMIC LAYER EPITAXY; DIMETHYLGERMANES; MOLECULAR PRECURSORS; SELF LIMITING MONOLAYER ADSORPTION;

SEMICONDUCTING GERMANIUM;

EID: 0030566264     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00490-4     Document Type: Article

References (21)

1. T. Suntla and M.J. Antson, U.S. Patent 4058430 (1977).
2. G.H. Goodman and M. Pessa, J. Appl. Phys. 60 (1986) R25.
3. T. Suntla, Mater. Sci. Rep. 4 (1989) 261.
4. A. Usui, Proc. IEEE 80 (1992) 1641.
5. S. Sugahara, S. Sugiura and M. Matsumura, Jpn. J. Appl. Phys. 32 (1993) 384.
6. S. Sugahara, M. Kadoshima, T. Kitamura, S. Imai and M. Matsumura, Appl. Surf. Sci. 90 (1995) 349.
7. D.A. Lapiano-Smith and F.R. McFreely, Thin Solid Films 225 (1993) 187.
8. A.C. Dillon, M.L. Wise, M.B. Robinson and S.M. George, J. Vac. Sci. Technol. A 13 (1995) 1.
9. H. Namba, T. Yamaguchi and H. Kuroda, Surf. Sci. 283 (1993) 132.
10. S. Sugahara, T. Kitamura, S. Imai and M. Matsumura, Appl. Surf. Sci. 82/83 (1994) 380.
11. V.I. Nefedov and O.A. Baschenko, J. Electron Spectrosc. Rel. Phen. 47 (1988) 1.
12. S. Tanuma, C.J. Powell and D.R. Penn, Surf. Interf. Anal. 21 (1994) 165.
13. F.J. Himpsel, M.R. McFreey, A. Taleb-Ibrahimi and J.A. Yarmoff, Phys. Rev. 38 (1988) 6084.
14. M.R. Arghavani, R. Braunstein, G. Chalmers, D. Shinrun and P. Yang, Solid State Commun. 71 (1989) 599.
15. M. Wittmer, D. Ugolini and P. Oelhafen, J. Electrochem. Soc. 137 (1990) 1256.
16. D. Schmeisser, R.D. Sschnell, A. Bogen, F.J. Himpsel and D. Rieger, Surf. Sci. 172 (1986) 455.
17. G. Boishin, G. Tyuliev and L. Surnev, Surf. Sci. 303 (1994) 333.
18. E. Sadayuki, S. Imai and M. Matsumura, Jpn. J. Appl. Phys. 34 (1995) 6166.
19. H. Ishii, Y. Takahashi and K. Fujinaga, J. Electrochem. Soc. 142 (1995) 1952.
20. H. Namba, T. Yamaguchi and H. Kuroda, Appl. Surf. Sci. 79/80 (1994) 449.
21. L.A. Okada, M.L. Wise and S.M. George, Appl. Surf. Sci. 82/83 (1994) 411.