A low temperature system with a pulse UV laser for scribing HTSC films and single crystals

Applied Surface Science

Volumn 106, Issue , 1996, Pages 321-325

  Zhuravel, A P ^a   Sivakov, A G ^a   Turutanov, O G ^a   Dmitrenko, I M ^a  

^a B VERKIN INSTITUTE FOR LOW TEMPERATURE PHYSICS AND ENGINEERING   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HIGH TEMPERATURE SUPERCONDUCTORS; LOW TEMPERATURE OPERATIONS; SINGLE CRYSTALS; SUPERCONDUCTING FILMS; ULTRAVIOLET RADIATION;

CRYOELECTRONIC DEVICES; LASER SCRIBING EQUIPMENT;

PULSED LASER APPLICATIONS;

EID: 0030565781     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00411-4     Document Type: Article

References (3)

1. M.G. Cohen, R.A. Kaplan and E.G. Arthurs, Proc. IEEE 70 (1982) 545.
2. I.M. Dmitrenko, P.A. Grib, A.G. Sivakov, O.G. Turutanov and A.P. Zhuravel, Low Temp. Phys. 19 (1993) 259.
3. A.V. Lukashenko, A.G. Sivakov, O.G. Turutanov, I.M. Dmitrenko and I.N. Chukanova, Cryogenics, 34 ICEC Suppl. (1994) 879.