SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 106, Issue , 1996, Pages 179-185

ArF excimer laser epitaxy of Si x Ge 1-x alloys studied by XRD and XPS

(8) Larciprete, R a Willmott, P a,c Martelli, S a Cesile, M C a Borsella, E a Chiussi, S b Gonzalez P b Leon B b

a ENEA (Italy)

b UNIVERSITY OF VIGO (Spain)

c UNIVERSITY OF ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; EXCIMER LASERS; MATHEMATICAL MODELS; SEMICONDUCTING GERMANIUM; SILICON ALLOYS; SUBSTRATES; SURFACES; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EXCIMER LASER INDUCED EPITAXY; LASER CHEMICAL VAPOR DEPOSITION; PULSE IRRADIATION;

PULSED LASER APPLICATIONS;

EID: 0030565721 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00430-8 Document Type: Article

Times cited : (11)

References (19)

1
- 30244509397
- I. Golecki, E.F Kennedy, S.S. Lau, J.W. Mayer, W.F. Tseng, R.C. Eckardt and R.J. Wagner, Thin Solid Films 57 (1979) L13.
- (1979) Thin Solid Films , vol.57
- Golecki, I.¹ Kennedy, E.F.² Lau, S.S.³ Mayer, J.W.⁴ Tseng, W.F.⁵ Eckardt, R.C.⁶ Wagner, R.J.⁷

2
- 0038965070
- J.R. Abelson, T.W. Sigmon, K.B. Kim and K.H. Weiner, Appl. Phys. Lett. 52 (1988) 230.
- (1988) Appl. Phys. Lett. , vol.52 , pp. 230
- Abelson, J.R.¹ Sigmon, T.W.² Kim, K.B.³ Weiner, K.H.⁴

3
- 11644298808
- K.J. Kramer, S. Taiwar and T.W. Sigmon, Appl. Phys. Lett. 61 (1992) 769.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 769
- Kramer, K.J.¹ Taiwar, S.² Sigmon, T.W.³

4
- 0029250831
- A. Slaoui, C. Deng, S. Taiwar, K.J. Kramer, T.W. Sigmon, J.P. Stoquert and B. Prevot, Appl. Surf. Sci. 86 (1995) 346.
- (1995) Appl. Surf. Sci. , vol.86 , pp. 346
- Slaoui, A.¹ Deng, C.² Taiwar, S.³ Kramer, K.J.⁴ Sigmon, T.W.⁵ Stoquert, J.P.⁶ Prevot, B.⁷

5
- 0028492385
- A. Slaoui, C. Deng, S. Talwar, K.J. Kramer and T.W. Sigmon, Appl. Phys. A 39 (1994) 203.
- (1994) Appl. Phys. A , vol.39 , pp. 203
- Slaoui, A.¹ Deng, C.² Talwar, S.³ Kramer, K.J.⁴ Sigmon, T.W.⁵

6
- 0040743424
- S. Lombardo, P.M. Smith, M.J. Uttormark, D.P. Brunco, K. Kramer and M.O. Thompson, Appl. Phys. Lett. 58 (1991) 1768.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1768
- Lombardo, S.¹ Smith, P.M.² Uttormark, M.J.³ Brunco, D.P.⁴ Kramer, K.⁵ Thompson, M.O.⁶

7
- 0542366555
- S. Lombardo, K. Kramer, M.O. Thompson and D.R. Smith, Appl. Phys. Lett. 59 (1991) 3455
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3455
- Lombardo, S.¹ Kramer, K.² Thompson, M.O.³ Smith, D.R.⁴

8
- 0026237705
- M. Berti, G. Mazzi, L. Calcagnile, A.V. Drigo, P.G. Merli and A. Migliori, J. Mater. Res. 6 (1991) 2120.
- (1991) J. Mater. Res. , vol.6 , pp. 2120
- Berti, M.¹ Mazzi, G.² Calcagnile, L.³ Drigo, A.V.⁴ Merli, P.G.⁵ Migliori, A.⁶

9
- 0028419806
- F. Repplinger, E. Fogarassy, A. Grob, J.J. Grob, D. Muller, B. Prevot, J.P. Stoquert and S. De Unamuno, Thin Solid Films 241 (1994) 155.
- (1994) Thin Solid Films , vol.241 , pp. 155
- Repplinger, F.¹ Fogarassy, E.² Grob, A.³ Grob, J.J.⁴ Muller, D.⁵ Prevot, B.⁶ Stoquert, J.P.⁷ De Unamuno, S.⁸

10
- 0039104910
- L. Calcagnile, M.G. Grimaldi and P. Baeri, J. Appl. Phys. 76 (1994) 1833.
- (1994) J. Appl. Phys. , vol.76 , pp. 1833
- Calcagnile, L.¹ Grimaldi, M.G.² Baeri, P.³

11
- 0029251156
- E.L. Mathé, A. Naudon, F. Repplinger and E. Fogarassy, Appl. Surf Sci. 86 (1995) 338.
- (1995) Appl. Surf Sci. , vol.86 , pp. 338
- Mathé, E.L.¹ Naudon, A.² Repplinger, F.³ Fogarassy, E.⁴

12
- 0347647301
- K.J. Kramer, S. Talwar, P.G. Carey, E. Ishida, D. Ashkenas, K.H. Weiner and T W. Sigmon, Appl. Phys. A 57 (1993) 91.
- (1993) Appl. Phys. A , vol.57 , pp. 91
- Kramer, K.J.¹ Talwar, S.² Carey, P.G.³ Ishida, E.⁴ Ashkenas, D.⁵ Weiner, K.H.⁶ Sigmon, T.W.⁷

13
- 0042256093
- K.J. Kramer, S. Talwar, T.W. Sigmon and K.H. Weiner, Appl. Phys. Lett. 65 (1994) 1709.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1709
- Kramer, K.J.¹ Talwar, S.² Sigmon, T.W.³ Weiner, K.H.⁴

14
- 0000632365
- P.E. Di Nunzio, S. Martelli and R. Ricci Bitti, J. Appl. Cryst. 28 (1995) 146.
- (1995) J. Appl. Cryst. , vol.28 , pp. 146
- Nunzio, P.E.D.¹ Martelli, S.² Bitti, R.R.³

15
- 0003459529
- PHI, Eden Prairie, MN
- C.D. Wagner, W.M. Riggs, L.E. Davis, J.F. Moulder and G.E. Muilenberg, Handbook of X-ray Photoelectron Spectroscopy (PHI, Eden Prairie, MN, 1979).
- (1979) Handbook of X-ray Photoelectron Spectroscopy
- Wagner, C.D.¹ Riggs, W.M.² Davis, L.E.³ Moulder, J.F.⁴ Muilenberg, G.E.⁵

16
- 0000415828
- A. Agarwal, J.K. Patterson, J.E. Greene and A. Rockett, Appl. Phys. Lett. 63 (1993) 518.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 518
- Agarwal, A.¹ Patterson, J.K.² Greene, J.E.³ Rockett, A.⁴

17
- 0003720630
- McGraw-Hill, New York
- M. Hansen, Constitution of Binary Alloys (McGraw-Hill, New York, 1958) p. 774.
- (1958) Constitution of Binary Alloys , pp. 774
- Hansen, M.¹

18
- 0004259685
- Eds. J.M. Poate and J.W. Mayer Academic Press, New York
- P. Baeri and S. Campisano, in: Laser Annealing of Semiconductors, Eds. J.M. Poate and J.W. Mayer (Academic Press, New York, 1982).
- (1982) Laser Annealing of Semiconductors
- Baeri, P.¹ Campisano, S.²

19
- 0003428292
- Springer, Berlin
- M. Von Allmen, Lase Beam Interaction with Materials (Springer, Berlin, 1986).
- (1986) Lase Beam Interaction with Materials
- Von Allmen, M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.