Heavy ion time-of-flight ERDA of high dose metal implanted germanium

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 278-282

  Dytlewski, N ^a   Evans, P J ^a   Noorman, J T ^a   Wielunski, L S ^b   Bunder, J ^c  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

^b CSIRO   (Australia)

^c UNIVERSITY OF WOLLONGONG   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC RECOIL DETECTION ANALYSIS; HEAVY ION;

ANNEALING; COPPER; GERMANIUM; ION SOURCES; IONS; PARTICLE DETECTORS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY; TEMPERATURE; TITANIUM;

ION IMPLANTATION;

EID: 0030565147     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01095-5     Document Type: Article

References (13)

1. S. Mantl, Nucl. Instr. and Meth. B 80 (1993) 895.
2. L. Krusin-Elbaum and M.O. Aboelfotoh, Appl. Phys. Lett. 58 (1991) 1341.
3. J. Li, Q.Z. Hong and J.W. Mayer, J. Appl. Phys. 66 (1989) 3600.
4. O. Thomas, S. Delage, F.M. d'Heurle and G. Scillia, Appl. Phys. Lett. 54 (1989) 228.
5. S.P. Ashburn, M.C. Öztürk, G. Harris and D.M. Maher, J. Appl. Phys. 74 (1993) 4455.
6. T.K. Marais, E. Taylor, M. Ndwande, B. Spoelstra and R. Pretorius, Nucl. Instr. and Meth. B 85 (1994) 183.
7. E.D. Marshall, C.S. Wu, C.S. Pai, D.M. Scott and S.S. Lau, Mater. Res. Soc. Symp. Proc. 47 (1985) 161.
8. J.M.E. Harper, A. Charai, L. Stolt, F.M. d'Heurle and P.M. Fryer, Appl. Phys. Lett. 56 (1990) 2519.
9. K. Prabhakaran and T. Ogino, Surf. Sci. 325 (1995) 263.
10. S.Q. Hong, C.M. Comrie, S.W. Russell and J.W. Mayer, J. Appl. Phys. 70 (1991) 3655.
11. I.G. Brown, J.E. Galvin, B.F. Gavin and R.A. MacGill, Rev. Sci. Instr. 57 (1986) 1069.
12. I.G. Brown and X. Godechot, IEEE Trans. Plasma Sci. 19 (1991) 713.
13. J.W. Martin, D.D. Cohen, N. Dytlewski, D.B. Garton, H.J. Whitlow and G.J. Russell, Nucl. Instr. and Meth. B 94 (1994) 277.