Fast position sensitive detection applied to time-of-flight ion scattering and recoil spectroscopy for realtime monitoring of surface composition and crystallography

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 758-765

  Schultz, J Albert ^a   Ulrich, Steve ^a   Woolverton, Laura ^a   Burton, William ^a   Waters, Kelley ^a   Klein, Christoph ^b   Wollnik, Hermann ^b  

^a Ionwerks   (United States)

^b JUSTUS LIEBIG UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTALLOGRAPHY; IONS; MONITORING; REAL TIME SYSTEMS; SCATTERING; SEMICONDUCTING SILICON; SPECTROSCOPY; SURFACE STRUCTURE; SURFACES;

FAST POSITION SENSITIVE DETECTION; REAL TIME MONITORING; RECOIL SPECTROSCOPY; TIME OF FLIGHT ION SCATTERING;

PARTICLE DETECTORS;

EID: 0030565135     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583x(96)00263-7     Document Type: Article

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