A compact wavelength-dispersive X-ray spectrometer for particle-induced X-ray emission analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 372-376

  Furukawa, Y ^a   Yokoyama, K ^a   Inoue, K ^a   Ishibashi, K ^a   Fukuyama, H ^a  

^a KOBE STEEL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CRYSTALS; FOCUSING; IONS; NITROGEN; OPTICS; OXYGEN; SEMICONDUCTING BORON; SEMICONDUCTING POLYMERS; TRACE ELEMENTS; X RAY SPECTROSCOPY;

ELASTIC RECOIL DETECTION ANALYSIS; ENERGY DISPERSIVE X RAY SPECTROMETRY; MULTILAYER X RAY ANALYZERS; PARTICLE INDUCED X RAY EMISSION ANALYSIS; RUTHERFORD BACKSCATTERING SPECTROMETRY; SOLID STATE DETECTOR;

X RAY SPECTROMETERS;

EID: 0030565101     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01180-3     Document Type: Article

References (4)

1. K. Inoue et al., Nucl. Instr. and Meth. B 54 (1991) 518.
2. M. Terasawa et al., Nucl. Instr. and Meth, B 75 (1993) 105.
3. A.G. Michette, Optical Systems for Soft X-rays (Plenum, 1986).
4. M.R. Howells and D. Lunt, Opt. Eng. 32 (1993) 1981.