Application of 14N(3He, 4He) 13N nuclear reaction to nitrogen depth profiling in metals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 167-171

  Wielunski, L S ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DEPTH RESOLUTION; NITROGEN CONCENTRATION MEASUREMENT; NITROGEN PROFILING; PARTICLE FILTERING;

ACCELERATOR SHIELDING; CALIBRATION; ION BEAMS; ION IMPLANTATION; METALS; NEUTRON IRRADIATION; NITROGEN; PARTICLE ACCELERATORS; PARTICLE BEAM DYNAMICS; PARTICLE DETECTORS; PROTONS; THIN FILMS;

NUCLEAR PHYSICS;

EID: 0030565081     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00242-X     Document Type: Article

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