Rutherford backscattering and channeling study of Au trapped at cavities in silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 34-38

  Wong Leung, J ^a   Williams, J S ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNELING; ENERGY STRAGGLING; STOPPING POWER;

ATOMS; GOLD; PARTICLE BEAM DYNAMICS; PRECIPITATION (CHEMICAL); RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY;

ION IMPLANTATION;

EID: 0030565043     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01189-7     Document Type: Article

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