SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 102, Issue , 1996, Pages 142-146

Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grown on silicon

(5) Kennou, S a,d Ladas, S a Grimaldi, M G b Nguyen Tan, T A c Veuillen, J Y c

a UNIVERSITY OF PATRAS (Greece)

b UNIVERSITY OF CATANIA (Italy)

c CNRS (France)

d UNIVERSITY OF IOANNINA (Greece)

Author keywords

Crystalline amorphous interfaces; Erbium silicide; Oxidation; Rutherford backscattering spectroscopy; X ray photoelectron spectroscopy

Indexed keywords

ANNEALING; ERBIUM COMPOUNDS; EVAPORATION; FILM GROWTH; INTERFACES (MATERIALS); OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE AMORPHOUS INTERFACES; ERBIUM SILICIDE; SOLID PHASE REACTIONS; ULTRAHIGH VACUUM (UHV) DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0030564920 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(96)00034-7 Document Type: Article

Times cited : (27)

References (13)

1
- 0009340993
- N.G. Einspruch Academic Press, New York
- M.A. Nicolet, in: VLSI Electronics, ed. N.G. Einspruch (Academic Press, New York, 1983).
- (1983) VLSI Electronics
- Nicolet, M.A.¹

2
- 84914617692
- T.A. Nguyen Tan, M. Azizan and J. Derrien, J. Vac. Sci. Technol. A 5 (1987) 1412.
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 1412
- Nguyen Tan, T.A.¹ Azizan, M.² Derrien, J.³

3
- 0024769949
- T.A. Nguyen Tan, N. Guerfi, J.Y. Veuillen and J. Derrien, Appl. Surf. Sci. 41 (1989) 266.
- (1989) Appl. Surf. Sci. , vol.41 , pp. 266
- Nguyen Tan, T.A.¹ Guerfi, N.² Veuillen, J.Y.³ Derrien, J.⁴

4
- 44049123642
- N. Guerfi, T.A. Nguyen Tan, J.Y. Veuillen and D.B. Lollman, Appl. Surf. Sci. 56-58 (1992) 501.
- (1992) Appl. Surf. Sci. , vol.56-58 , pp. 501
- Guerfi, N.¹ Nguyen Tan, T.A.² Veuillen, J.Y.³ Lollman, D.B.⁴

5
- 0028484917
- G.L.P. Berning and H.C. Swart, Appl. Surf. Sci. 78 (1994) 339.
- (1994) Appl. Surf. Sci. , vol.78 , pp. 339
- Berning, G.L.P.¹ Swart, H.C.²

6
- 0003750648
- Academic Press, New York
- J.W. Mayer and E. Rimini, ed., Ion Beam Handbook for Material Analysis (Academic Press, New York, 1977).
- (1977) Ion Beam Handbook for Material Analysis
- Mayer, J.W.¹ Rimini, E.²

7
- 25744444248
- F.P. Netzer, R.A. Wille and M. Grunze, Surf. Sci. 102 (1981) 75.
- (1981) Surf. Sci. , vol.102 , pp. 75
- Netzer, F.P.¹ Wille, R.A.² Grunze, M.³

8
- 0028409459
- S. Kennou, J.Y. Veuillen and T.A. Nguyen Tan, Surf. Sci. 307-309 (1994) 258.
- (1994) Surf. Sci. , vol.307-309 , pp. 258
- Kennou, S.¹ Veuillen, J.Y.² Nguyen Tan, T.A.³

9
- 0003998388
- The Chemical Rubber Company
- CRC Handbook of Chemistry and Physics, 52nd Ed. (The Chemical Rubber Company, 1972).
- (1972) CRC Handbook of Chemistry and Physics, 52nd Ed.

10
- 30244548542
- Springer Verlag
- Gmelin: Handbuch der Anorganischen Chemie, 8th Ed. Part C1 (Springer Verlag, 1974).
- (1974) Gmelin: Handbuch der Anorganischen Chemie, 8th Ed. , Issue.PART C1

11
- 30244471280
- Si, Verlag Chemie
- Gmelin: Handbuch der Anorganischen Chemie, 8th Ed. 15 (Si, Part B) (Verlag Chemie, 1959).
- (1959) Gmelin: Handbuch der Anorganischen Chemie, 8th Ed. , vol.15 , Issue.PART B

12
- 0042244093
- A. Fujimori, M. Grioni and J.H. Weaver, Phys. Rev. B 33 (1986) 726.
- (1986) Phys. Rev. B , vol.33 , pp. 726
- Fujimori, A.¹ Grioni, M.² Weaver, J.H.³

13
- 0003828439
- D. Briggs and M.P. Seah, Wiley, New York
- M.P. Seah, in: Practical Surface Analysis, ed. D. Briggs and M.P. Seah, Vol. 1 (Wiley, New York, 1990).
- (1990) Practical Surface Analysis , vol.1
- Seah, M.P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.