Strain relaxation and self-organizing MBE-growth of local SiGe-structures

Applied Surface Science

Volumn 102, Issue , 1996, Pages 385-389

  Rupp, T ^a   Eisele, I ^a   Gravesteijn, D J ^b  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); MOLECULAR BEAM EPITAXY; NUCLEATION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM DOTS; SEMICONDUCTOR QUANTUM WIRES; STRESS RELAXATION;

DEFECT FREE GROWTH; MESA STRUCTURES; SELF ORGANIZING GROWTH;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030564885     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(96)00083-9     Document Type: Article

References (16)

1. N. Usami, T. Mine, S. Fukatsu and Y. Shiraki, Appl. Phys. Lett. 64 (9) (1994) 1126.
2. B. Dietrich, E. Bugiel, H.J. Osten and P. Zaumseil, J. Appl. Phys. 74 (12) (1993) 7223.
3. A. Nishida, K. Nakagawa, E. Murakami and M. Miyao, J. Appl. Phys. 71 (12) (1992) 5913.
4. E. Hammerl, F. Wittmann, J. Messarosch, I. Eisele, V. Huber and H. Oppolzer, Mat. Res. Soc. Symp. Proc. 220 (1991) 27.
5. H. Gossner, H. Baumgärtner, E. Hammerl, F. Wittmann, I. Eisele, H. Lorenz and T. Heinzel, Jpn. J. Appl. Phys. 33 (4B) (1994) 2268.
6. E.A. Fitzgerald, P.D. Kirchner, R. Proano, G.D. Pettit, J.M. Woodall and D.G. Ast, Appl. Phys. Lett. 52 (18) (1988) 1496.
7. E.A. Fitzgerald, G.P. Watson, R.E. Proano, D.G. Ast, P.D. Kirchner, G.D. Pettit et al., J. Appl. Phys. 65 (6) (1989) 2220.
8. F.K. LeGoues, B.S. Meyerson and J.F. Morar, Phys. Rev. Lett. 66 (22) (1991) 2903.
9. K. Ismail, F.K. LeGoues, K.L. Sainger, M. Arafa, J.O. Chu, P.M. Mooney and B.S. Meyerson, Phys. Rev. Lett. 73 (25) (1994) 3447.
10. A.A. van Gorkum, G.F.A. van de Walle, R.A. van den Heuvel, D.J. Gravesteijn and C.W. Fredriksz, Thin Solid Films 184 (1990) 207.
11. H. Gossner, G. Fehlauer, W. Kiunke, I. Eisele, M. Stolz, M. Hintermaier et al., Mater. Res. Soc. Symp. Proc. 351 (1994) 393.
12. R. People, IEEE J. Quantum Electron. QE-22 (1986) 1696.
13. S.M. Prokes, O.J. Glembocki, M.E. Twigg and K.L. Wang, J. Electron. Mater. 20 (5) (1991) 389.
14. E.A. Fitzgerald, J. Vac. Sci. Technol. B 7 (1989) 782.
15. T. Stoica and L. Vescan, J. Cryst. Growth 131 (1-2) (1993) 32.
16. E.A. Fitzgerald, Y.-H. Xie, M.L. Green, D. Brasen, A.R. Kortan, J. Michel et al., Appl. Phys. Lett. 59 (7) (1991) 811.