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Volumn 102, Issue , 1996, Pages 163-168
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Electron microscopy characterisation of erbium silicide-thin films grown on a Si(111) substrate
a,c a a b b |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL STRUCTURE;
ELECTRON DIFFRACTION;
EPITAXIAL GROWTH;
ERBIUM COMPOUNDS;
EVAPORATION;
FILM GROWTH;
PHASE COMPOSITION;
PRECIPITATION (CHEMICAL);
SEMICONDUCTING SILICON COMPOUNDS;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
CRYSTALLOGRAPHIC SHEAR STRUCTURES;
DEFECT MODULATED STRUCTURES;
DEPOSITION RATIOS;
STRUCTURAL VARIANTS;
SEMICONDUCTING FILMS;
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EID: 0030564867
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/0169-4332(96)00040-2 Document Type: Article |
Times cited : (10)
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References (10)
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