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Volumn 102, Issue , 1996, Pages 28-32
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Bulk and surface structural properties of Si 1-x-y Ge x C y layers processed on Si(001) by pulsed laser induced epitaxy
e
UNIV PARIS SUD
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ATOMIC FORCE MICROSCOPY;
CARBON;
EPITAXIAL GROWTH;
FILM GROWTH;
LASER BEAM EFFECTS;
PULSED LASER APPLICATIONS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SUBSTRATES;
SURFACE STRUCTURE;
X RAY DIFFRACTION ANALYSIS;
ELECTRON CHANNELLING PATTERN ANALYSIS;
LASER FLUENCE;
PULSED LASER INDUCED EPITAXY (PLIE);
RUGOSITY;
SEMICONDUCTING FILMS;
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EID: 0030564799
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/0169-4332(96)00013-X Document Type: Article |
Times cited : (4)
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References (11)
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