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Journal of Crystal Growth

Volumn 165, Issue 1-2, 1996, Pages 57-60

The fabrication of nickel and chromium suicide using an XeCl excimer laser

(5) Barbero, C J a Deng, C a Sigmon, T W a,c Russell, S W b Alford, T L b

a OREGON HEALTH AND SCIENCE UNIVERSITY (United States)

b ARIZONA STATE UNIVERSITY (United States)

c STANFORD UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; DEPOSITION; ELECTRON BEAMS; EVAPORATION; EXCIMER LASERS; FABRICATION; INTERFACES (MATERIALS); LASER APPLICATIONS; NICKEL; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CHROMIUM SILICIDES; ELECTRON BEAM EVAPORATION; LASER FLUENCES; NICKEL SILICIDES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030564608 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/0022-0248(95)00427-0 Document Type: Article

Times cited : (6)

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