Charging phenomenon of insulators in negative-ion implantation

Applied Surface Science

Volumn 100-101, Issue , 1996, Pages 360-364

  Toyota, Yoshitaka ^a   Tsuji, Hiroshi ^a   Nagumo, Shoji ^a   Gotoh, Yasuhito ^a   Ishikawa, Junzo ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE; ELECTRIC INSULATORS; ELECTRIC POWER DISTRIBUTION; ELECTRIC VARIABLES MEASUREMENT; ION IMPLANTATION; MATHEMATICAL MODELS; VOLTAGE MEASUREMENT;

CHARGING MODEL; CHARGING VOLTAGE; ENERGY DISTRIBUTION; SECONDARY ELECTRON ENERGY ANALYSIS;

SURFACE PHENOMENA;

EID: 0030564431     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(96)00242-5     Document Type: Article

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8. M.P. Seah, Surf. Sci. 17 (1969) 132.
9. Y. Toyota, H. Honda, S. Nagumo, H. Tsuji, Y. Gotoh and J. Ishikawa, Ext. Abstr. 42th Spring Meeting of the Japan Soc. of Appl. Phys. and Rel. Soc., Hiratsuka, March, 28p-N-8 (in Japanese).