SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 100-101, Issue , 1996, Pages 51-55

Auger electron spectroscopy measurement of electron attenuation lengths using multilayer systems

(3) Suzuki, M a Mogi, K b Takenaka, H a

a NTT CORPORATION (Japan)

b NTT Advanced Technology Corporation (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; ATTENUATION; ELECTRONS; IONS; MULTILAYERS; RHODIUM; SEMICONDUCTING INDIUM COMPOUNDS; SILICA; SPUTTERING; SURFACES; THICKNESS MEASUREMENT; THIN FILMS;

ATTENUATION LENGTH; ELECTRON ATTENUATION; FREE ELECTRON MODEL; ION SPUTTERING;

AUGER ELECTRON SPECTROSCOPY;

EID: 0030564397 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(96)00255-3 Document Type: Article

Times cited : (2)

References (18)

1
- 0003885146
- Wiley, Sussex
- D. Briggs and M.P. Seah, Eds., Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (Wiley, Sussex, 1988).
- (1988) Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy
- Briggs, D.¹ Seah, M.P.²

2
- 0004814110
- D.R. Penn, J. Electron Spectrosc. Rel. Phen. 9 (1976) 29.
- (1976) J. Electron Spectrosc. Rel. Phen. , vol.9 , pp. 29
- Penn, D.R.¹

3
- 0028387002
- S. Tanuma, C.J. Powell and D.R. Penn, Surf. Interf. Anal. 21 (1994) 165.
- (1994) Surf. Interf. Anal. , vol.21 , pp. 165
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

4
- 0026401803
- S. Tanuma, C.J. Powell and D.R. Penn, Surf. Interf. Anal. 17 (1991) 927.
- (1991) Surf. Interf. Anal. , vol.17 , pp. 927
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

5
- 0018436046
- M.P. Seah and W.A. Dench, Surf. Interf. Anal. 1 (1979) 2.
- (1979) Surf. Interf. Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dench, W.A.²

6
- 0040284300
- H. Tokutaka, K. Nishimori and H. Hayashi, Surf. Sci. 149 (1985) 349.
- (1985) Surf. Sci. , vol.149 , pp. 349
- Tokutaka, H.¹ Nishimori, K.² Hayashi, H.³

7
- 0027694274
- H. Hu and A.H. Carim, J. Electrochem. Soc. 140 (1993) 3203.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 3203
- Hu, H.¹ Carim, A.H.²

8
- 0001499434
- J.E. Fulghum, R. Stokell, G. McGuire, B. Patnaik, N. Yu, Y.J. Zhao and N. Parikh, J. Electron Spectrosc. Rel. Phen. 60 (1992) 117.
- (1992) J. Electron Spectrosc. Rel. Phen. , vol.60 , pp. 117
- Fulghum, J.E.¹ Stokell, R.² McGuire, G.³ Patnaik, B.⁴ Yu, N.⁵ Zhao, Y.J.⁶ Parikh, N.⁷

9
- 0001466483
- G.K. Wertheim, D.M. Riffe, N.V. Smith and P.H. Citrin, Phys. Rev. B 46 (1992) 1955.
- (1992) Phys. Rev. B , vol.46 , pp. 1955
- Wertheim, G.K.¹ Riffe, D.M.² Smith, N.V.³ Citrin, P.H.⁴

10
- 0027680465
- P. Marcus, C. Hinnen and I. Olefjord, Surf. Interf. Anal. 20 (1993) 923.
- (1993) Surf. Interf. Anal. , vol.20 , pp. 923
- Marcus, P.¹ Hinnen, C.² Olefjord, I.³

11
- 0021377550
- A. Zalar, Thin Solid Films 124 (1985) 223.
- (1985) Thin Solid Films , vol.124 , pp. 223
- Zalar, A.¹

12
- 0025536394
- H. Takenaka, Y. Ishii, K. Kurihara and H. Kinoshita, Proc. SPIE 1345 (1990) 213.
- (1990) Proc. SPIE , vol.1345 , pp. 213
- Takenaka, H.¹ Ishii, Y.² Kurihara, K.³ Kinoshita, H.⁴

13
- 30244546241
- Mikro-i™, KOBE STEEL Ltd., 2-3-2 Toyo, Koto, Tokyo 135, Japan
- Mikro-i™, KOBE STEEL Ltd., 2-3-2 Toyo, Koto, Tokyo 135, Japan.

14
- 30244552784
- Scanning Auger Nanoprobe 670xi, Physical Electronics Inc., Minnesota, USA
- Scanning Auger Nanoprobe 670xi, Physical Electronics Inc., Minnesota, USA.

15
- 84957230935
- A. Jablonski and S. Tougaard, J. Vac. Sci. Technol. A 8 (1990) 106.
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 106
- Jablonski, A.¹ Tougaard, S.²

16
- 0026371472
- S. Tanuma, C.J. Powell and D.R. Penn, Surf. Interf. Anal. 17 (1991) 911.
- (1991) Surf. Interf. Anal. , vol.17 , pp. 911
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

17
- 0002730950
- S. Hofmann, Prog. Surf. Sci. 36 (1991) 35.
- (1991) Prog. Surf. Sci. , vol.36 , pp. 35
- Hofmann, S.¹

18
- 30244454081
- private communication
- S. Tanuma, private communication.
- Tanuma, S.¹

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