Role of hydrogen in the growth of hydrogenated microcrystalline silicon

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 2, 1996, Pages 931-934

  Shirai, Hajime ^a   Arai, Takeshi ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; DEPOSITION; ELLIPSOMETRY; GROWTH (MATERIALS); HYDROGEN; HYDROGENATION; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; X RAY DIFFRACTION;

CRYSTALLINITY; CRYSTALLITE SIZE; GAS HEATING TECHNIQUES; GLASS SUBSTRATE; HYDROGENATED MICROCRYSTALLINE SILICON; INHOMOGENEITY; LAYER BY LAYER TECHNIQUE; ULTRAVIOLET INFRARED SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS SILICON;

EID: 0030563577     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(96)00089-0     Document Type: Article

References (8)

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