|
Volumn 198-200, Issue PART 1, 1996, Pages 478-481
|
Influence of annealing above the deposition temperature on metastability in amorphous silicon
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
DEFECTS;
DEPOSITION;
HYDROGEN;
MICROSTRUCTURE;
QUENCHING;
THERMAL EFFECTS;
AMORPHOUS HYDROGENATED SILICON;
HOT WIRE TECHNIQUE;
LIGHT SOAKING;
METASTABILITY;
AMORPHOUS SILICON;
|
EID: 0030563548
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-3093(95)00742-3 Document Type: Article |
Times cited : (7)
|
References (18)
|