Nuclear magnetic resonance studies of amorphous deuterated silicon nitride thin films

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 1, 1996, Pages 77-80

  Santos Filho, P ^a   Stevens, G ^a   Lucovsky, G ^a   Cull, T ^b   Fedders, P ^b   Leopold, D ^b   Norberg, R ^b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DEUTERIUM; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PLASMA APPLICATIONS; SILICON NITRIDE;

AMORPHOUS DEUTERATED SILICON NITRIDE THIN FILMS; BOND STRETCHING FREQUENCIES; CENTER FREQUENCIES; DEUTERON MAGNETIC RESONANCE; DOUBLET CUSP SPLITTING; LOCAL BONDING PROPERTIES; QUADRUPOLAR BROADENED PAKE TYPE DOUBLETS;

AMORPHOUS FILMS;

EID: 0030563441     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(95)00662-1     Document Type: Article

References (7)

1. P. Santos-Filho, J. Bodart and R. E. Norberg, in: Conf. Proc. 10th European Photovoltaic Sol. Energy Conf., Lisbon (Kluwer, Dordrecht, 1991).
2. Yi Ma, PhD thesis, North Carolina State University (1993).
3. G. Stevens and P. Santos-Filho, Mater. Res. Soc. Symp. Proc. 377 (1995) 313.
4. A. Abragam, The Principles of Nuclear Magnetism (Oxford University, London, 1961).
5. D. Leopold, J. Boyce, P. Fedders and R. Norberg, Phys. Rev. B26 (1982) 6053.
6. M. Mokarram and J. Ragle, J. Chem. Phys. 59 (1973) 2770.
7. G. Lucovsky, Z. Jing, P. Santos-Filho, G. Stevens and A. Banerjee, these Proceedings, p. 19.