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Volumn 198-200, Issue PART 2, 1996, Pages 919-922
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Ge nanocrystals with a sharp size distribution: A detailed study of the crystallization of a-Si1-xOxGey alloy films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS ALLOYS;
ANNEALING;
CRYSTAL GROWTH;
CRYSTALLIZATION;
GERMANIUM;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
NANOSTRUCTURED MATERIALS;
PARTICLE SIZE ANALYSIS;
RECRYSTALLIZATION (METALLURGY);
SILICON ALLOYS;
THIN FILMS;
CLUSTER SIZE;
DIMERES;
GERMANIUM NANOCRYSTALS;
SHARP SIZE DISTRIBUTION;
THIN AMORPHOUS SILICON OXIDE GERMANIUM ALLOY FILMS;
TRIMERES;
AMORPHOUS FILMS;
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EID: 0030563389
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-3093(96)00084-1 Document Type: Article |
Times cited : (11)
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References (9)
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