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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 169-172

Kinetics of impurity gettering on buried defects created by MeV argon implantation

(5) Grob, A a Rohr, P a Mariani, G b Sevely, J c Grob, J J a

a Lab de Phys et Applic des S (France)

b AIX MARSEILLE UNIVERSITY (France)

c CEMES CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ANNEALING; ARGON; CRYSTAL DEFECTS; GOLD; MATHEMATICAL MODELS; PLATINUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

IMPLANTATION DOSE; IMPLANTATION TEMPERATURE; METALLIC CONTAMINATION CONCENTRATION;

ION IMPLANTATION;

EID: 0030563370 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/0168-583X(95)01014-9 Document Type: Article

Times cited : (14)

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