Properties of amorphous boron nitride thin films

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 1, 1996, Pages 403-406

  Zedlitz, R ^a,b   Heintze, M ^a   Schubert, M B ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; AMORPHOUS MATERIALS; BONDING; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; CUBIC BORON NITRIDE; ELECTRONIC DENSITY OF STATES; ENERGY GAP; INFRARED SPECTROSCOPY; STOICHIOMETRY; X RAY DIFFRACTION;

BAND TAILS; ELECTRIC BREAK THROUGH FIELD STRENGTH; HYDROGEN CONCENTRATION; PHOTOTHERMAL DEFLECTION SPECTROSCOPY; POWER DENSITY;

THIN FILMS;

EID: 0030563358     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(95)00748-2     Document Type: Article

References (8)

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