Selective deposition of amorphous germanium on Si with respect to SiO2 by organometallic CVD

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 2, 1996, Pages 1026-1028

  Prokop, J ^a   Merica, R ^a   Glatz, F ^a   Veprek, S ^a   Klingan, F R ^a   Herrmann, W A ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; GERMANIUM ALLOYS; INFRARED SPECTROSCOPY; LOW TEMPERATURE OPERATIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICA; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

SELECTIVE DEPOSITION; STRUCTURED WAFER;

SILICON WAFERS;

EID: 0030563275     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(96)00027-0     Document Type: Article

References (6)

1. P. Wickboldt, Ph.D. thesis, Harvard University (1993); F.H. Karg, B. Hirschauer, W Kaspar and K. Pierz, Sol. Energy Mater. 22 (1991) 169; S. Veprek, F. Glatz and R. Konwitschy, J. Non-Cryst. Solids 137-138 (1991) 779.
2. P. Wickboldt, Ph.D. thesis, Harvard University (1993); F.H. Karg, B. Hirschauer, W Kaspar and K. Pierz, Sol. Energy Mater. 22 (1991) 169; S. Veprek, F. Glatz and R. Konwitschy, J. Non-Cryst. Solids 137-138 (1991) 779.
3. P. Wickboldt, Ph.D. thesis, Harvard University (1993); F.H. Karg, B. Hirschauer, W Kaspar and K. Pierz, Sol. Energy Mater. 22 (1991) 169; S. Veprek, F. Glatz and R. Konwitschy, J. Non-Cryst. Solids 137-138 (1991) 779.
4. F. Glatz, R. Konwitschny, M.G.J. Veprek-Hejman and S. Veprek, MRS Symp. Proc. 336 (1994) 499.
5. W.A. Herrmann, M. Denk, J. Behm, W. Scherer, F.-R. Klingan, H. Bock, B. Solouki and M. Wagner, Angew. Chem. Int. Ed. Engl. 31 (1992) 1485.
6. F. Glatz, J. Prokop, S. Veprek, F.-R. Klingan and W.A. Herrmann, MRS Symp. Proc. 336 (1994) 541.