Defects in magnetron-sputtered a-Ge1-xNx:H

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 1, 1996, Pages 375-378

  Min, Hoonkee ^a   Ueda, Shoichi ^a   Ishii, Nobuhiko ^b   Kumeda, Minoru ^a   Shimizu, Tatsuo ^a  

^a KANAZAWA UNIVERSITY   (Japan)

^b FUKUI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; CHEMICAL BONDS; DEFECTS; DEPOSITION; ELECTRON SPIN RESONANCE SPECTROSCOPY; GERMANIUM ALLOYS; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; OPTICAL VARIABLES MEASUREMENT; PHASE SEPARATION; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

DANGLING BONDS; GLASS SUBSTRATES; QUARTZ SUBSTRATES;

AMORPHOUS FILMS;

EID: 0030563256     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(96)00158-5     Document Type: Article

References (7)

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6. P.C. Taylor, in: Semiconductors and Semimetals, Vol. 21, Part C, ed. J.I. Pankove (Academic Press, New York, 1984) p. 99.
7. T. Shimizu, M. Kumeda, A. Morimoto, Y. Tsujimura and I. Kobayashi, Mater. Res. Soc. Symp. 70 (1986) 313.