SCOPUS 정보 검색 플랫폼

Volumn 198-200, Issue PART 2, 1996, Pages 1146-1150

Prospects for utilizing low temperature amorphous to crystalline phase transformation to define circuit elements; a new frontier for very large scale integrated technology

(2) Fortmann, Charles M a Shimizu, Isamu b

a Stony Brook University (United States)

b TOKYO INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; DEPOSITION; DIFFUSION; ETCHING; SEMICONDUCTING SILICON; THIN FILMS; VLSI CIRCUITS;

IN SITU CIRCUIT WRITING PROCESS; MASK PATTERNING; NANOMETER SCALE CIRCUIT ELEMENTS;

PHASE TRANSITIONS;

EID: 0030563225 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/0022-3093(96)00101-9 Document Type: Article

Times cited : (9)

References (14)

1
- 0000305356
- D. He, N. Okada, C.M. Fortmann and I. Shimizu, J. Appl. Phys. 76 (1994) 4728.
- (1994) J. Appl. Phys. , vol.76 , pp. 4728
- He, D.¹ Okada, N.² Fortmann, C.M.³ Shimizu, I.⁴

2
- 36449000019
- T. Akasaka and I. Shimizu, App. Phys. Lett. 66 (1995) 3441.
- (1995) App. Phys. Lett. , vol.66 , pp. 3441
- Akasaka, T.¹ Shimizu, I.²

3
- 30244437771
- PhD Thesis, Department of Electrical Chemistry, The Graduate School at Nagatsuta, Tokyo Institute of Technology, Yokohama, Japan
- M. Nakata, PhD Thesis, Department of Electrical Chemistry, The Graduate School at Nagatsuta, Tokyo Institute of Technology, Yokohama, Japan (1992).
- (1992)
- Nakata, M.¹

4
- 30244436067
- to be presented San Francisco, CA, April
- C.M. Fortmann, P. Hapke, A. Lambertz and F. Finger, to be presented at the Spring Meeting of Mater. Res. Soc., San Francisco, CA, April 1994.
- (1994) Spring Meeting of Mater. Res. Soc.
- Fortmann, C.M.¹ Hapke, P.² Lambertz, A.³ Finger, F.⁴

5
- 0024831501
- N. Saxena, D.E. Albright, C.M. Fortmann, T.W.F. Russell, P.M. Fauchet and I.H. Campbell, J. Non-Cryst. Solids 114 (1989) 801.
- (1989) J. Non-cryst. Solids , vol.114 , pp. 801
- Saxena, N.¹ Albright, D.E.² Fortmann, C.M.³ Russell, T.W.F.⁴ Fauchet, P.M.⁵ Campbell, I.H.⁶

6
- 0003960770
- Wiley, New York
- J.W. Moore and R.G. Pearson, Kinetics and Mechanism, 3rd Ed. (Wiley, New York, 1981) p. 161.
- (1981) Kinetics and Mechanism, 3rd Ed. , pp. 161
- Moore, J.W.¹ Pearson, R.G.²

7
- 0001567337
- F. Finger, C. Malten, P. Hapke, R. Carius, R. Fluckiger and H. Wagner, Philos. Mag. Lett. 70 (1994) 247.
- (1994) Philos. Mag. Lett. , vol.70 , pp. 247
- Finger, F.¹ Malten, C.² Hapke, P.³ Carius, R.⁴ Fluckiger, R.⁵ Wagner, H.⁶

8
- 85056911965
- D.J. Frank, S.E. Laux and M.V. Fischetti, IEEE IEDM Tech. Dig. Dec. (1992) 553.
- (1992) IEEE IEDM Tech. Dig. Dec. , pp. 553
- Frank, D.J.¹ Laux, S.E.² Fischetti, M.V.³

9
- 30244432611
- private communication
- J. Hoyt, private communication (1995).
- (1995)
- Hoyt, J.¹

10
- 0027889406
- K. Yano, T. Ishii, T. Hashimoto, T. Kobayashi, F. Murai and K. Seki, IEEE IEDM Tech. Dig. Dec. (1993) 541.
- (1993) IEEE IEDm Tech. Dig. Dec. , pp. 541
- Yano, K.¹ Ishii, T.² Hashimoto, T.³ Kobayashi, T.⁴ Murai, F.⁵ Seki, K.⁶

11
- 4143128474
- San Francisco Press, Berkeley
- R.F.W. Pease, Record of IEEE Symposium on Electron, Ion and Laser Beams (San Francisco Press, Berkeley, 1967) p. 176.
- (1967) Record of IEEE Symposium on Electron, Ion and Laser Beams , pp. 176
- Pease, R.F.W.¹

12
- 0039813772
- D.H. Narum and R.F.W. Pease, J. Vac. Sci. Technol. B6 (1988) 966.
- (1988) J. Vac. Sci. Technol. , vol.B6 , pp. 966
- Narum, D.H.¹ Pease, R.F.W.²

13
- 0042115384
- H. Kasahara, H. Sawaragi, R. Aihara, K. Gamo, S. Namba and M.H. Schearer, J. Vac. Sci. Technol. B6 (1988) 974.
- (1988) J. Vac. Sci. Technol. , vol.B6 , pp. 974
- Kasahara, H.¹ Sawaragi, H.² Aihara, R.³ Gamo, K.⁴ Namba, S.⁵ Schearer, M.H.⁶

14
- 30244479342
- private communication
- R.W.F. Pease, private communication (1995).
- (1995)
- Pease, R.W.F.¹

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