Etching and functionalization of a fluorocarbon polymer by UV laser treatment

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 586-590

  Girardeaux, C ^a   Idrissi, Y ^a   Pireaux, J J ^a   Caudano, R ^a  

^a UNIVERSITY OF NAMUR   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; BIOCOMPATIBILITY; COMPOSITION; CONTACT ANGLE; ETCHING; EXCIMER LASERS; OXYGEN; SURFACE TREATMENT; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

FUNCTIONALIZATION; ULTRAVIOLET LASERS;

POLYTETRAFLUOROETHYLENES;

EID: 0030563066     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00558-7     Document Type: Article

References (17)

1. D.P. Seraphin, D.E. Barr, W.T. Chen, G.P. Schmitt and R.R. Tummala, in: Microelectronics Packaging Handbook, Eds. R.R. Tummala and E.J. Rymaszewski (Van Nostrand Reinhold, New York, 1989).
2. R. Linsker, R. Srinivasan, J.J. Wynne and D.R. Alonso, Laser Surg. Med. 4 (1984) 201.
3. Z.Z. Li, J.E. Code and W.P. Van De Merwe, Laser Surg. Med. 12 (1992) 625.
4. G.C. Couto and S.V. Babu, J. Appl. Phys. 76 (1994) 3052.
5. Y. Novis, R. De Meulemeester, M. Chtaïb, J.J. Pireaux and R. Caudano, Brit. Polym. J. 21 (1989) 147.
6. M. Chtäib, E.M. Roberfroid, Y. Novis, J.J. Pireaux, R. Caudano, P. Lutgen and G. Feyder, J. Vac. Sci. Technol. A 7 (1989) 3233.
7. Y. Novis, J.J. Pireaux, A. Brezini, E. Petit, R. Caudano, P. Lutgen, G. Feyder and S. Lazare, J. Appl. Phys. 64 (1988) 365.
8. J.J. Pireaux, R. De Meulemeester, E.M. Roberfroid, Ch. Grégoire, M. Chtäib, Y. Novis, J. Riga and R. Caudano, Nucl. Instr. Meth. Phys. Res. B 105 (1995) 186.
9. I.W. Boyd and R.B. Jackman, Eds., Photochemical Processing of Electronic Materials (Academic Press, London, 1992).
10. T.G. Vargo, J.A. Gardella, J.M. Calvert and M.S. Chen, Science 262 (1993) 1711.
11. M.K. Shi, B. Lamontagne, A. Selmani, L. Martinu, E. Sacher, M.R. Wertheimer and A. Yelon, J. Vac. Sci. Technol. A 12 (1994) 29; ibid. 807.
12. M.K. Shi, B. Lamontagne, A. Selmani, L. Martinu, E. Sacher, M.R. Wertheimer and A. Yelon, J. Vac. Sci. Technol. A 12 (1994) 29; ibid. 807.
13. J.J. Pireaux, J.P. Delrue, A. Hecq and J.P. Dauchot, Physicochemical Aspects of Polymer Surfaces, Vol. 1, Ed. K.L. Mittal (Plenum, New York, 1983) pp. 53-82.
14. G. Beamson and D. Briggs, High Resolution XPS of Organic Polymers, the Scienta ESCA300 Database (Wiley, Chichester, 1992).
15. S. Wu, Polymer Interface and Adhesion (Dekker, New York, 1982) ch. 4, pp. 257-274.
16. N. Shimo, T. Uchida and H. Masuhara, Mater. Res. Soc. Symp. Proc. 191 (1990) 91; N. Shimo and T. Uchida, in: Microchemistry-Spectroscopy and Chemistry in Small Domains, Proc. JRDC-KUL Joint Int. Symp. (1994) p. 109.
17. N. Shimo, T. Uchida and H. Masuhara, Mater. Res. Soc. Symp. Proc. 191 (1990) 91; N. Shimo and T. Uchida, in: Microchemistry-Spectroscopy and Chemistry in Small Domains, Proc. JRDC-KUL Joint Int. Symp. (1994) p. 109.