Deposition of optical coatings by pulsed laser ablation

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 752-759

  Reisse, Guenter ^a   Weissmantel, Steffen ^a   Keiper, Bernd ^a   Broulik, Ulrike ^a  

^a Hochschule Mittweida   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; DEPOSITION; ION BOMBARDMENT; LASER ABLATION; LASER PULSES; MULTILAYERS; OPTICAL COATINGS; REFRACTIVE INDEX;

EXCIMER LASER; GROWTH RATE; HAFNIA FILM; LASER DAMAGE THRESHOLDS; OXYGEN IONS; YTTRIA FILM; ZIRCONIA FILM;

OPTICAL FILMS;

EID: 0030562943     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00549-8     Document Type: Article

References (9)

1. H. Sankur, J. DeNatale, W. Gunning and J.G. Nelson, J. Vac. Sci. Technol. A 5 (1987) 2869.
2. H. Sankur, Thin Solid Films 218 (1992) 161.
3. S. Scaglione, D. Flori, I. Soyme and A. Piegari, Thin Solid Films 214 (1992) 188.
4. G. Reiße, B. Keiper, S. Weißmantel, H. Johansen, R. Scholz and T. Martini, Thin Solid Films 241 (1994) 119.
5. G. Reiße, B. Keiper, S. Weißmantel, H. Johansen, R. Scholz and T. Martini, Phys. Stat. Sol. (a) 145 (1994) 461.
6. G. Reiße, B. Keiper, S. Weißmantel, B. Steiger, H. Johansen, R. Scholz and T. Martini, Appl. Surf. Sci. 86 (1995) 107.
7. B. Steiger, personal communication.
8. G. Reiße, S. Weißmantel, B. Keiper and B. Steiger, in: Laser Induced Thin Film Processing, Ed. J.J. Dubowski, Proc. SPIE 2403 (1995) 212.
9. S. Metev, in: Pulsed Laser Deposition of Thin Films, Eds. D.B. Chrisey and G.K. Hubler (Wiley, New York, 1994) p. 255.