XPS study of the reaction of the Si(100) surface with a C 2 H 4 beam

Applied Surface Science

Volumn 92, Issue , 1996, Pages 287-290

  Takagaki, T ^a   Igari, Y ^a   Takaoka, T ^a   Kusunoki, I ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CARBONIZATION; METHANE; MOLECULAR BEAMS; MOLECULES; SILICON CARBIDE; SUBSTRATES; TEMPERATURE; X RAY PHOTOELECTRON SPECTROSCOPY;

MECHANICAL BOOSTER PUMP; MOLECULAR BEAM APPARATUS; MULTI SURFACE ANALYSIS SYSTEM; OIL ROTARY PUMP; SURFACE TEMPERATURE;

SURFACES;

EID: 0030562341     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00243-X     Document Type: Article

References (6)

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2. I. Kusunoki and Y. Igari, Appl. Surf. Sci. 59 (1992) 95.
3. M.P. Seah and W.A. Dench, Surf. Interf. Anal. 1 (1979) 2.
4. L. Clemen, R.M. Wallace, P.A. Taylor, M.J. Dresser, W.J. Choyke, W.H. Weinberg and J.T. Yates, Jr., Surf. Sci. 268 (1992) 205.
5. J. Yoshinobu, H. Tsuda, M. Onchi and M. Nishijima, J. Chem. Phys. 87 (1987) 7332.
6. I. Kusunoki, M. Hiroi, T. Sato, Y. Igari and S. Tomoda, Appl. Surf. Sci. 45 (1990) 171.