XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source

Applied Surface Science

Volumn 92, Issue , 1996, Pages 61-65

  Yan, H ^a   Kwok, R W M ^a   Wong, S P ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPOSITION; ION IMPLANTATION; ION SOURCES; SILICON; SILICON CARBIDE; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITION DEPTH PROFILES; METAL VAPOR VACUUM ARC ION SOURCE;

THIN FILMS;

EID: 0030562175     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00203-0     Document Type: Article

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