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Journal of Crystal Growth

Volumn 158, Issue 3, 1996, Pages 191-196

Observation of stacking faults and prismatic punching systems in silicon by light scattering tomography

(4) Kissinger, G a Vanhellemont, J b Claeys, C b Richter, H a

a Institute of Semiconductor Physics (Germany)

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); ETCHING; HIGH TEMPERATURE OPERATIONS; IMAGING TECHNIQUES; INFRARED RADIATION; LASER BEAMS; LIGHT SCATTERING; SILICA; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY;

DEFECT ARRANGEMENT; DEFECT ETCHING; FRANK TYPE DISLOCATION LOOP; HIGH VOLTAGE ELECTRON MICROSCOPY; INFRARED LIGHT SCATTERING TOMOGRAPHY; PRECIPITATE; PRISMATIC PUNCHING SYSTEMS;

SILICON WAFERS;

EID: 0030562039 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/0022-0248(95)00473-4 Document Type: Article

Times cited : (19)

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