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Plasma Chemistry and Plasma Processing

Volumn 16, Issue 1, 1995, Pages S157-S168

Control of substrate temperature during diamond deposition

(2) Bieberich, M T a,b Girshick, S L a

a UNIVERSITY OF MINNESOTA (United States)

b Thomas and Betts Corporation (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030555453 PISSN: 02724324 EISSN: 15728986 Source Type: Journal
DOI: 10.1007/BF01512633 Document Type: Article

Times cited : (26)

References (15)

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2
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3
- 0028413250
- (1994) Diamond Relat. Mater. , vol.3 , pp. 373
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4
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- Tamor, M.A.¹ Everson, M.P.²

5
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6
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7
- 0027611045
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- Girshick, S.L.¹ Li, C.² Yu, B.W.³ Han, H.⁴

8
- 0027665990
- (1993) Plasma Chem. Plasma Process. , vol.13 , pp. 433
- Owano, T.G.¹ Kruger, C.H.²

9
- 0026103239
- (1991) Thin Solid Films , vol.196 , pp. 271
- Hanssen, L.M.¹ Snail, K.A.² Carrington, W.A.³ Butler, J.E.⁴ Kellogg, S.⁵ Oakes, D.B.⁶

10
- 84951648773
- K. A. Snail and T. P. Thorpe, U.S. patent no. 5,318,801, June 7, 1994.

11
- 84951648774
- T. P. Thorpe, K. A. Snail, R. G. Vardiman, and T. Smith, Proc. 3rd Intl. Symp. Diamond Mater., Honolulu, May 1993, edited by J. Dismukes and K. Ravi, Electrochemical Society vol. 93–17.

12
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- (1993) Diamond Relat. Mater. , vol.2 , pp. 1090
- Girshick, S.L.¹ Yu, B.W.² Li, C.³ Han, H.⁴

13
- 84951648775
- M. T. Bieberich, M.S. thesis, University of Minnesota, 1994.

14
- 0003419726
- Thermal Radiative Properties of Matter
- Y. S., Touloukian et al., IFI/Plenum, New York
- (1975) Thermophysical Properties of Matter
- Touloukian, Y.S.¹ DeWitt, D.P.²

15
- 0027580655
- (1993) Diamond Relat. Mater. , vol.2 , pp. 708
- Spiberg, P.¹ Woodin, R.L.² Butler, J.E.³ Dhar, L.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.