A study of X-ray reflectivity data analysis methods for thin film thickness determination

Powder Diffraction

Volumn 11, Issue 2, 1996, Pages 114-116

  Brower, D T ^a   Revay, R E ^a   Huang, T C ^b  

^a Optex Communications Corp   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

SrS; Thin film thickness; X ray reflectivity

Indexed keywords

CURVE FITTING; FILM THICKNESS; REFLECTION; STRONTIUM;

BRAGG EQUATION; CURVE FITTING METHODS; PEAK SEPARATIONS; THICKNESS VALUE; X RAY REFLECTIVITY;

THIN FILMS;

EID: 0030554574     PISSN: 08857156     EISSN: 19457413     Source Type: Journal    
DOI: 10.1017/S0885715600009076     Document Type: Article

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