Determination of impurities in silicon nitride and silicon carbide by microwave digestion

Bunseki Kagaku

Volumn 45, Issue 4, 1996, Pages 357-361

  Tanimoto, Manami ^b   Fukumura, Hirotaka ^a  

^a KYOCERA CORPORATION   (Japan)

^b NONE

Author keywords

Acid decomposition of silicon nitride and silicon carbide; Determination of impurities in silicon nitride and silicon carbide; Microwave digestion

Indexed keywords

EID: 0030546898     PISSN: 05251931     EISSN: None     Source Type: Journal    
DOI: 10.2116/bunsekikagaku.45.357     Document Type: Article

References (9)

1. (Bunseki Kagaku), 33, 506 (1984).
2. (Bunseki), 1990, 506.
3. JIS R 1603, (1984)
4. (Bunseki Kagaku), 33, 486 (1984).
5. (Bunseki Kagaku), 41, T151 (1992).
6. (Bunseki), 1992, 48.
7. (Bunseki Kagaku), 43, 351 (1994).