Neon ion beam-induced surface reactions of SF6 adsorbed molecules with silicon at low temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 234-239

  Royer, J ^a   Tessier, P Y ^a   Grolleau, B ^a   Turban, G ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030539885     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579926     Document Type: Article

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