High plasma current density processes with different vapor sources

International Journal of Refractory Metals and Hard Materials

Volumn 14, Issue 1-3 SPEC. ISS., 1996, Pages 167-172

  Bergmann, E ^a  

^a Balzers Limited   (Liechtenstein)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030533044     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/0263-4368(96)83430-5     Document Type: Article

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