Ion deposition by inductively coupled plasma mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 370-373

  Hu, Ke ^a,b   Houk, R S ^a  

^a IOWA STATE UNIVERSITY   (United States)

^b Thermo Jarrell Ash Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030530654     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579903     Document Type: Article

References (22)

1. Handbook of Ion Beam Processing Technology, edited by J. J. Cuomo, S. M. Rossnagel, and H. R. Kaufman (Noyes, Park Ridge, NJ, 1989)
2. S. Shimizu, O. Tsukakoshi, and S. Komiya, J. Vac Sci. Technol. B 3, 554 (1985).
3. R. A. Zuhr, B. R. Appleton, N. Herbots, B. C. Larson, T. S. Noggle, and S. J. Pennycook, J. Vac. Sci. Technol. A 5, 2135 (1987).
4. T. E. Haynes, R. A. Zuhr, S. J. Pennycook, and B. R. Appleton, Appl. Phys. Lett. 54, 1439 (1989).
5. J. F. Ziegler, Ion Implantation: Science and Technology, 2nd ed. (Academic, New York, 1988).
6. Handbook of Ion Sources, edited by B. H. Wolf (Chemical Rubber, Boca Raton, FL, 1995).
7. R. S. Houk, Acc. Chem. Res. 27, 333 (1994).
8. K. E. Jarvis, A. L. Gray, and R. S. Houk, Handbook of ICP-MS (Blackie, London, 1992).
9. T. B. Reed, J. Appl. Phys. 32, 821, 2534 (1961); 34, 2266 (1963).
10. T. B. Reed, J. Appl. Phys. 32, 821, 2534 (1961); 34, 2266 (1963).
11. B. D. Merkle, R. N. Kniseley, and F. A. Schmidt, J. Appl. Phys. 62, 1017 (1987).
12. X. Chen and R. S. Houk, Spectrochim. Acta B (in press).
13. G. Li, Y. Duan, and G. M. Hieftje, J. Mass Spectrom. 30, 841 (1995).
14. K. Eberhardt, G. Buchen, G. Herrmann, and N. Trautmann, Spectrochim. Acta Part B 47, 89 (1992).
15. K. Hu, P. S. Clemons and R. S. Houk, J. Am. Soc. Mass Spectrom. 4, 16 (1993).
16. K. Hu, Ph.D. dissertation, Iowa State University, Ames, Iowa, 1992, Chap. IV.
17. K. W. Olson, W. J. Haas, Jr., and V. A. Fassel, Anal. Chem. 49, 632 (1977).
18. B. R. Bear and V. A. Fassel, Spectrochim. Acta B 41, 1089 (1986).
19. M. S. Dresselhaus and R. Kalish, Ion Implantation in Diamond, Graphite and Related Materials (Springer, Berlin, 1992), p. 28.
20. R. C. Hutton (personal communication).
21. S. D. Tanner, Spectrochim. Acta B 47, 809 (1992).
22. H. Niu and R. S. Houk, Spectrochim. Acta Part B (to be published).