Characteristics of Cu thin films on a glass substrate by partially ionized beam deposition at room temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2517-2521

  Yoon, Y S ^a   Kim, K H ^a   Jang, H G ^a   Jung, H J ^a   Koh, S K ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030520069     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580012     Document Type: Article

References (17)

1. A. J. Wilson and J. F. B. Hawkes, Laser Principles and Applications (Prentice-Hall, New York, 1987).
2. G. McComb, The Laser Cookbook (TAB Books, Blue Ridge Summit, PA, 1988).
3. G. Hass, J. Opt. Soc. Am. 45, 945 (1955).
4. H. A. Macleod, Thin-film Optical Filters, 2nd ed. (Hilger, London, 1986), pp. 137-140.
5. P. Bai, G.-R. Yang, T.-M. Lu, and L. W. M. Lau, J. Vac. Sci. Technol. A 8, 1465 (1990).
6. S. K. Koh, Y. S. Yoon, K. H. Kim, and H. J. Jung, Thin Solid Films (submitted).
7. J. L. Vossen and W. Kern, Thin Film Processes (Academic, New York, 1978).
8. S. K. Koh, Y. S. Yoon, K. H. Kim, H. J. Jung, G. C. Kim, T. K. Park, K. W. Lee, and S. J. Park Kor. J. Appl. Phys. (submitted).
9. G. H. Takaoka, Junzo Ishikawa, and Toshinori Takagi, J. Vac. Sci. Technol. A 8, 840 (1990).
10. L. L. Levenson, M. Asano, T. Tanaka, H. Usui, I. Yamada, and T. Takagi, J. Vac. Sci. Technol. A 6, 1552 (1988).
11. J. Gspann, Nucl. Instrum. Methods B 37/38, 775 (1989).
12. M. Sosnowski, S. Kronmenhoek, Jyh Sheen and R. H. Cornely, J. Vac. Sci. Technol. A 8, 1458 (1990).
13. M. L. Theye, Phys. Rev. B 2, 3060 (1970); 18, 2897 (1978).
14. M. L. Theye, Phys. Rev. B 2, 3060 (1970); 18, 2897 (1978).
15. D. E. Aspnes, E. Kinsbron, and D. D. Bacon, Phys. Rev. B 21, 3290 (1980).
16. Y. S. Yoon, S. S. Yom, C. H. Wang, and D. J. Choi J. Appl. Phys. (submitted).
17. Y. S. Yoon, Y. K. Yoon. J. Y. Lee, and S. S. Yom, Jpn. J. Appl. Phys. 33, 4075 (1994).