Minimum profile ultrahigh vacuum gate valve based on linear/rotary motion feedthrough

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2669-2670

  Stolow, Albert ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030516068     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580000     Document Type: Article

References (2)

1. E. E. Chaban and J. E. Reutt-Robey, Rev. Sci. Instrum. 64, 2391 (1993).
2. I. Fischer, D. M. Villeneuve, M. J. J. Vrakking, and A. Stolow, J. Chem. Phys. 102, 5566 (1995).