Vacuum ultraviolet emission from radio frequency plasmas of SF6 and CF4

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2102-2105

  Li, Jan ^a,b   McConkey, J W ^a  

^a UNIVERSITY OF WINDSOR   (Canada)

^b UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030504037     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580087     Document Type: Article

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