Hollow-cathode assisted sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2674-2676

  Backhouse, C J ^a   Dew, S K ^a   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030503372     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580002     Document Type: Article

References (11)

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