Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2331-2336

  Urban III, Frank K ^a   Comfort, John Craig ^a  

^a The Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030502161     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580018     Document Type: Article

References (13)

1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).
2. F. K. Urban III, D. C. Park, and M. F. Tabet, Thin Solid Films 220, 247 (1992).
3. F. K. Urban III and M. F. Tabet, Thin Solid Films 245, 167 (1993).
4. K. Levenberg, Quart. Appl. Math. 2, 164 (1994).
5. D. W. Marquardt, J. Soc. Indust. Appl. Math. II, 431 (1963).
6. P. Drude, Ann. Phys. 36, 865 (1889).
7. Optical Properties of Solids: New Developments, edited by B. O. Seraphin (North-Holland, Amsterdam, 1976).
8. F. K. Urban III and J. C. Comfort, Thin Solid Films 253, 262 (1994).
9. M. F. Tabet, Masters thesis, Florida International University, Miami, Florida (1992).
10. F. S. Acton, Numerical Methods that Work (Harper, New York, 1970).
11. G. M. Phillips and P. J. Taylor, Theory and Practice of Numerical Analysis (Academic, New York, 1973).
12. M. Yamamoto and T. Namioka, Appl. Opt. 31, 1612 (1992).
13. D. Barton (private communication).