Laser desorption study of deuterium implanted in silicon carbide

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3130-3134

  Keroack D ^a   Terreault, B ^a  

^a INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030495903     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580181     Document Type: Article

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