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Volumn 61, Issue 9, 1996, Pages 745-753

Calculation of the electron number density spatial distribution in the ICAP

Author keywords

Electron number density; Inductively coupled plasma; Mathematical modelling

Indexed keywords


EID: 0030495896     PISSN: 03525139     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (1)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.