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Volumn 61, Issue 9, 1996, Pages 745-753
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Calculation of the electron number density spatial distribution in the ICAP
a a a a |
Author keywords
Electron number density; Inductively coupled plasma; Mathematical modelling
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Indexed keywords
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EID: 0030495896
PISSN: 03525139
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (1)
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References (10)
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