Study of ZrO2 film evolution by secondary ion mass spectrometry

Rapid Communications in Mass Spectrometry

Volumn 10, Issue 14, 1996, Pages 1769-1773

  Daolio, S ^a   Kristof J ^b   Piccirillo, C ^a   Gelosi, S ^a   Facchin, B ^a   Pagura, C ^a  

^a CNR   (Italy)

^b UNIVERSITY OF PANNONIA   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE COMPOUNDS; COATINGS; INTERFACES (MATERIALS); SECONDARY EMISSION; THIN FILMS; ZIRCONIA;

CALCINATION TEMPERATURE; CONCENTRATION-DEPTH PROFILE; EVOLVED GAS ANALYSIS; FILM EVOLUTION; SECONDARY ION-MASS SPECTROMETRY; THIN-FILMS; TITANIA SUPPORTS; TRACE COMPONENTS; ZIRCONIA FILM; ZRO 2 FILMS;

SECONDARY ION MASS SPECTROMETRY;

EID: 0030474112     PISSN: 09514198     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0231(199611)10:14<1769::AID-RCM691>3.0.CO;2-A     Document Type: Article

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