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Volumn 52, Issue , 1996, Pages 649-654

Development of mesoscale actuation device

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTS; INTELLIGENT MATERIALS; MICROELECTROMECHANICAL DEVICES; SILICON; WORM GEARS;

EID: 0030422371     PISSN: 07334230     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (9)

References (11)
  • 4
    • 3643086120 scopus 로고    scopus 로고
    • Burleigh Instrument, Inc., Fishers, NY
    • "Micro positioning System", Burleigh Instrument, Inc., Fishers, NY.
    • Micro Positioning System
  • 8
    • 0012654769 scopus 로고    scopus 로고
    • Burleigh Instrument Inc., Fishers, NY
    • "The Piezo Book", Burleigh Instrument Inc., Fishers, NY.
    • The Piezo Book
  • 10
    • 0029488141 scopus 로고
    • Micro-opto-mechanical Devices Fabricated by Anisotropie Etching of (110) Silicon
    • Dec.
    • Y. Uenishi, M. Tsugai, and M. Mehregany, "Micro-opto-mechanical Devices Fabricated by Anisotropie Etching of (110) Silicon", Journal of Micromechanics and microengineering", Vol. 5, No. 4, Dec. 1995, pp. 305-312.
    • (1995) Journal of Micromechanics and Microengineering , vol.5 , Issue.4 , pp. 305-312
    • Uenishi, Y.1    Tsugai, M.2    Mehregany, M.3
  • 11
    • 0026938462 scopus 로고
    • Static friction of diamond-like carbon film in MEMS
    • Oct.
    • K. Deng and W.H. Ko, "Static friction of diamond-like carbon film in MEMS", Sensors and Actuators A (Physical), Vol. A35, No.1, Oct. 1992, pp. 45-50.
    • (1992) Sensors and Actuators A (Physical) , vol.A35 , Issue.1 , pp. 45-50
    • Deng, K.1    Ko, W.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.